1987•MRS ProceedingsRequires access

Microstructures of Polysilicon

Rodney Daniel Sinclair, Altaf H. Carim, J. Morgiel, J. C. Bravman

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Key concepts: Polysilicon depletion effect, Polycrystalline silicon, Materials science, Microstructure, Silicon, Transmission electron microscopy, Optoelectronics, Capacitor

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