J.R. Reid, LaVern A. Starman, R.T. Webster
Abstract
An analytical calculation of microwave actuation for shunt capacitive MEMS switches is presented. This calculation shows that the microwave signal deflects the beam according to the RMS voltage of the signal. In addition, heating of the beam due to dissipated microwave power is shown to play a significant role in microwave actuation.
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An analytical calculation of microwave actuation for shunt capacitive MEMS switches is presented. This calculation shows that the microwave signal deflects the beam according to the RMS voltage of the signal. In addition, heating of the beam due to dissipated microwave power is shown to play a significant role in microwave actuation.
Key concepts: Microelectromechanical systems, Capacitive sensing, Microwave, Voltage, Materials science, Electrical engineering, SIGNAL (programming language), Beam (structure)