G. Bartolucci, R. Marcelli, S. Catoni, B. Margesin, Flavio Giacomozzi, Andrea Lucibello, Viviana Mulloni, Paola Farinelli
Abstract
A novel circuital model for a shunt connected RF MEMS coplanar switch, based on a fully analytical approach, is presented. The numerical simulations performed with the proposed new model are in good agreement with experimental measurements.
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A novel circuital model for a shunt connected RF MEMS coplanar switch, based on a fully analytical approach, is presented. The numerical simulations performed with the proposed new model are in good agreement with experimental measurements.
Key concepts: Microelectromechanical systems, Capacitive sensing, Shunt (medical), Electronic engineering, Radio frequency, Computer science, Materials science, Electrical engineering