Simulation of that the Rotated Square Holes Effect on the Shunt Capacitive RF MEMS Switch

In this paper, the effects of holes with different rotation angles on radio frequency micro electro mechanical system (RF MEMS) switch are analyzed. In micro- scale, the holes play important role on the performance of the shunt capacitive RF MEMS switch. This paper uses the conventional RF MEMS switch struture and compares with proposed structures to see if the roated holes could improve the performance. From the computed result, it can be found that the roated holes can certainly improve the performance when the roated angle is 30°, in which the actuarion time is reduced by 0.1 μs.