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1989•Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and AtomsRequires access

Film formation of dititanium nitride by the dynamic mixing method

Masato Kiuchi, Kanenaga Fujii, Hiroshi Miyamura, Kohei Kadono, Mamoru Satou, Fuminori Fujimoto

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Key concepts: Tin, Titanium nitride, Titanium, Nitrogen, Nitride, Materials science, Deposition (geology), Ion

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