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2013•Journal of Surface Investigation X-ray Synchrotron and Neutron TechniquesRequires access

Features of the structure of TiN films after irradiation with nitrogen

А. З. Хамдохов, Р. Ш. Тешев, З. М. Хамдохов, В. С. Куликаускас, П. Н. Черных

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Abstract

In this work, we study the structure of submicron titanium-nitride films after surface treatment with a nitrogen-ion beam. It is ascertained that nitrogen-ion beams affect two-phase TiN-Ti films thus transforming them into single-phase TiN.

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What this paper is about

In this work, we study the structure of submicron titanium-nitride films after surface treatment with a nitrogen-ion beam. It is ascertained that nitrogen-ion beams affect two-phase TiN-Ti films thus transforming them into single-phase TiN.

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OpenAlex reports 2 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

In this work, we study the structure of submicron titanium-nitride films after surface treatment with a nitrogen-ion beam. It is ascertained that nitrogen-ion beams affect two-phase TiN-Ti films thus transforming them into single-phase TiN.

Key concepts: Tin, Titanium nitride, Nitrogen, Materials science, Nitride, Irradiation, Titanium, Phase (matter)

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