1999•Microelectronics ReliabilityRequires access

A simulation-based semiconductor chip yield model incorporating a new defect cluster index

Chi‐Hyuck Jun, Yushin Hong, Soo Young Kim, Kwang‐Su Park, Hangyeob Park

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Key concepts: Cluster (spacecraft), Chip, Yield (engineering), Negative binomial distribution, Index (typography), Wafer, Statistics, Regression analysis

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