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2014•Journal of Micromechanics and MicroengineeringRequires access

Design and fabrication of in-plane AFM probes with sharp silicon nitride tips based on refilling of anisotropically etched silicon moulds

Joël Geerlings, Edin Sarajlic, Erwin Berenschot, Martin Herman Siekman, Henri V. Jansen, Léon Abelmann, Niels R. Tas

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Abstract

Design and fabrication of in-plane AFM probes with sharp silicon nitride tips based on refilling of anisotropically etched silicon moulds, Geerlings, J, Sarajlic, E, Berenschot, J W, Siekman, M H, Jansen, H V, Abelmann, L, Tas, N R

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Design and fabrication of in-plane AFM probes with sharp silicon nitride tips based on refilling of anisotropically etched silicon moulds, Geerlings, J, Sarajlic, E, Berenschot, J W, Siekman, M H, Jansen, H V, Abelmann, L, Tas, N R

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OpenAlex reports 11 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

Design and fabrication of in-plane AFM probes with sharp silicon nitride tips based on refilling of anisotropically etched silicon moulds, Geerlings, J, Sarajlic, E, Berenschot, J W, Siekman, M H, Jansen, H V, Abelmann, L, Tas, N R

Key concepts: Fabrication, Materials science, Wafer, Silicon nitride, Monocrystalline silicon, Silicon, Microelectromechanical systems, Surface micromachining

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