2004•Unpublished venueRequires access

A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

Dooyoung Hah, Chang-Auck Choi, Chi‐Hoon Jun, Youn Tae Kim

Abstract

A self-aligned vertical comb-drive actuator fabricated using surface micromachining is presented. One- and two-axis tilt scanning micromirrors with the actuators were fabricated and tested. A mechanical tilt angle of /spl plusmn/1.4/spl deg/ at 66 V/sub DC/ was achieved for a 1-mm-diameter micromirror.

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Available abstract

Key concepts: Tilt (camera), Surface micromachining, Actuator, Comb drive, Materials science, Optics, Bulk micromachining, Surface (topology)