2004•Thin Solid FilmsRequires access

Deposition of organosilicon thin films using a remote thermal plasma

Maikel F. A. M. van Hest, Bogdana Maria Mitu, D.C. Schram, M. C. M. van de Sanden

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Key concepts: Organosilicon, Hexamethyldisiloxane, Thin film, Carbon film, Elastic recoil detection, Deposition (geology), Fourier transform infrared spectroscopy, Substrate (aquarium)

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