1997•Bulletin of Materials ScienceRequires access

Application of MO calculation to plasma-enhanced CVD using organosilicon compounds

Osamu Takai, Atsushi Hozumi, Yasushi Inoue, Takashi Komori

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Key concepts: Organosilicon, Hexamethyldisiloxane, Materials science, Contact angle, Silane, Polytetrafluoroethylene, Substrate (aquarium), Chemical engineering