A Linear Piezoelectric Linear Motor Driven by the in-Plane Longitudinal and Bending Vibrations of an H-Shaped Vibrator

In order to develop theoretical instructions for design of high performance linear motor, a piezoelectric linear motor based on an H-shaped vibrator is proposed, which employed the vibrator’s 2nd bending vibration mode and 1st longitudinal planar vibration to drive the motor in this paper. Firstly, the driving principle of the motor is presented, and the elliptical motion generated on the driving end of the vertical bars of the vibrator is proved. Then, FEM simulation model is built for the vibrator, which is used to calculate the vibrator’s working modes and to execute harmonic response analysis and sensitivity analysis for the vibrator. Furthermore, the vibration’s optimal size is given and the motor assembly structure is designed. Finally, modal test is done for the vibrator to validate the anticipated work modes vibration and the bending vibration and longitudinal planar vibration could be 1.4μm and1.2μm under normal drive.