2007•Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and AtomsRequires access

The influence of the properties of evaporation source on the discharge characteristics of MgO film

Yoshikazu Tanaka, Shih Hsiu Hsiao, Yasuhiko Morimoto, Akihiro NAKAO, Ari Ide‐Ektessabi

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Key concepts: Evaporation, Crystallite, Electron beam physical vapor deposition, Materials science, Layer (electronics), Deposition (geology), Cathode ray, Plasma