Özlem Duyar, Frank Placido, H.Z. Durusoy
Abstract
We report the development of TiO2 films by reactive electron beam evaporation, using a recently introduced Ti3O5 material as the starting material. The processing window to prepare high quality stoichiometric TiO2 was found quite narrow.
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We report the development of TiO2 films by reactive electron beam evaporation, using a recently introduced Ti3O5 material as the starting material. The processing window to prepare high quality stoichiometric TiO2 was found quite narrow.
Key concepts: Evaporation, Electron beam physical vapor deposition, Materials science, Cathode ray, Stoichiometry, Electron, Beam (structure), Materials processing