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2009•Thin Solid FilmsRequires access

Interface roughness effect between gate oxide and metal gate on dielectric property

Jong Yeog Son, W. J. Maeng, Woo‐Hee Kim, Young‐Han Shin, Hyungjun Kim

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Key concepts: Gate dielectric, Gate oxide, Dielectric, High-κ dielectric, Materials science, Oxide, Metal gate, Surface finish

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