2013•IEEE Electron Device LettersRequires access

Temperature-Compensated High-Frequency Surface Acoustic Wave Device

Changjian Zhou, Yi Yang, Hua-Lin Cai, Tian‐Ling Ren, Mansun Chan, Cary Y. Yang

Abstract

We report high-frequency surface acoustic wave (SAW) devices with excellent temperature stability using a layered structure consisting of single-crystal LiNbO3thin film on SiO2/LiNbO3substrate. SAW devices with a wavelength of 2 μm have been fabricated and several wave modes ranging from ~ 1.5 to 2.1 GHz have been obtained. With the SiO2interlayer providing the temperature compensation and the top single-crystal Z-cut LiNbO3piezoelectric thin film for acoustic wave excitation, the fabricated SAW devices exhibit excellent temperature coefficients of frequency. Theoretical calculations are presented to elucidate temperature compensation of the proposed layered structure.

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Key concepts: Surface acoustic wave, Substrate (aquarium), Compensation (psychology), Crystal (programming language), Materials science, Optoelectronics, Analytical Chemistry (journal), Physics