2010•The proceedings of the JSME annual meetingOpen access

T0302-2-1 The study of micro sensor using surface acoustic wave

Yoshinobu Murakawa, Sumito Nagasawa, Hiroki Kuwano

Abstract

In this study, a surface acoustic wave (SAW) gas sensor device is proposed for ubiquitous sensor networks to monitor environment. The propagation characteristics of SAW is changed by mass change at SAW substrate surface. The interdigital electrodes and detector film of the SAW gas sensor were fabricated and evaluated by Vector Network Analyzer.

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Key concepts: Surface acoustic wave, Surface acoustic wave sensor, Network analyzer (electrical), Acoustics, Materials science, Substrate (aquarium), Detector, Electrode