1994•Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and PhenomenaOpen access

Interpretation of atomic force microscopy images: The mica (001) surface with a diamond tip apex

Hao Tang, Christian Joachim, J. Devillers

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Abstract

Constant-force atomic force microscopy (AFM) images of the muscovite mica surface are calculated and compared to experimental ones. The surface structure is first optimized using a molecular mechanic procedure. Force–distance characteristics are proposed to determine the applied force range where the surface is not deformed. Calculated rigid substrate and tip apex AFM images are interpreted and compared with the experimental ones. A full relaxed calculated scan is presented and compared to rigid calculated scans.

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Key concepts: Mica, Muscovite, Conductive atomic force microscopy, Atomic force microscopy, Diamond, Materials science, Surface (topology), Apex (geometry)