2007•Microelectronics ReliabilityRequires access

Electrical characterization of crystalline Gd2O3 gate dielectric MOSFETs fabricated by damascene metal gate technology

Ralf Endres, Yordan Stefanov, Udo Schwalke

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Key concepts: Copper interconnect, Materials science, Characterization (materials science), Gate dielectric, Metal gate, Gate oxide, Dielectric, Optoelectronics

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