2012•Thin Solid FilmsOpen access

ZrB2 thin films grown by high power impulse magnetron sputtering from a compound target

Mattias Samuelsson, Jens A. D. Jensen, Ulf Helmersson, Lars Hultman, Hans Högberg

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Key concepts: High-power impulse magnetron sputtering, Materials science, Elastic recoil detection, Scanning electron microscope, Sputter deposition, Thin film, Analytical Chemistry (journal), Electrical resistivity and conductivity

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ZrB2 thin films grown by high power impulse magnetron sputtering from a compound target — Research Paper | ScholarLens