2001•TANSOOpen access

Hydrogen Concentration Determination of Carbon Materials by Elastic Recoil Detection Analysis

H. Kakiuchi, Tomohiro Kobayashi, Takayuki Terai

Abstract

Elastic recoil detection analysis (ERDA) is a useful, non-destructive method to determine the hydrogen concentration in several materials. By means of the method, we measured the hydrogen concentration of a diamond-like carbon (DLC) thin film prepared by RF magnetron sputtering method and successfully determined its depth distribution by the comparison of the ERDA spectrum and the DEPTH code calculation. The hydrogen concentration was about 35 at. % and less near the surface region of the DLC thin film, which is in the appropriate concentration range for DLC previously reported. As a result, we confirmed that ERDA is an effective method for measuring hydrogen concentration without destruction.

Open-access reader

About this research paper

What this paper is about

Why it matters

OpenAlex reports 1 citations for this work. Citation counts describe recorded attention and do not establish research quality.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

Key concepts: Elastic recoil detection, Hydrogen, Materials science, Diamond-like carbon, Carbon fibers, Ion beam analysis, Thin film, Analytical Chemistry (journal)