2004•Materials science forumOpen access

In Situ SiC Feeding by Chemical Vapor Deposition for Bulk Growth

Ludovic Charpentier, Francis Baillet, Didier Chaussende, Laurent Auvray, Michel Pons, Etienne Pernot, R. Madar

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Key concepts: Materials science, In situ, Chemical vapor deposition, Combustion chemical vapor deposition, Hybrid physical-chemical vapor deposition, Chemical engineering, Nanotechnology, Deposition (geology)

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In Situ SiC Feeding by Chemical Vapor Deposition for Bulk Growth — Research Paper | ScholarLens