2021•The Japan Society of Applied PhysicsRequires access

Growth of hexagonal boron nitride thin films on c-plane sapphire substrates by low pressure chemical vapor deposition using a cold-wall CVD-reactor

Taira Watanabe, Kazuki Matsushita, Yūki Tanaka, Riku YOSHIOKA, Katsumi Masuda, Hiroko Kominami, Kazuhiko Hara

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Key concepts: Materials science, Chemical vapor deposition, Hexagonal boron nitride, Hybrid physical-chemical vapor deposition, Sapphire, Combustion chemical vapor deposition, Boron nitride, Boron

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Growth of hexagonal boron nitride thin films on c-plane sapphire substrates by low pressure chemical vapor deposition using a cold-wall CVD-reactor — Research Paper | ScholarLens