Alfred A. Zinn
Abstract
This chapter contains sections titled: Introduction Precursors-Synthesis-Proptie Chemical Vapor Deposition (CVD) In Situ Catalysis of Tungsten Deposition Laser-Assisted Chemical Vapor Deposition (LCVD) Plasma-Enhanced Chemical Vapor Deposition (PECVD) Summary and Outlook
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This chapter contains sections titled: Introduction Precursors-Synthesis-Proptie Chemical Vapor Deposition (CVD) In Situ Catalysis of Tungsten Deposition Laser-Assisted Chemical Vapor Deposition (LCVD) Plasma-Enhanced Chemical Vapor Deposition (PECVD) Summary and Outlook
Key concepts: Chemical vapor deposition, Plasma-enhanced chemical vapor deposition, Combustion chemical vapor deposition, Tungsten, Hybrid physical-chemical vapor deposition, Deposition (geology), Ion plating, Materials science