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2010•VacuumRequires access

Tungsten-doped ZnO transparent conducting films deposited by direct current magnetron sputtering

Huafu Zhang, Hanfa Liu, Chengxin Lei, Yuan Changkun, Aiping Zhou

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Key concepts: Materials science, Tungsten, Doping, Sputter deposition, Optoelectronics, Sputtering, Cavity magnetron, Direct current

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