2010•Unpublished venueRequires access

State-of-the-Art and Trends in Through-Silicon Via (TSV) and 3D Integrations

John Hon-Shing Lau

Open publisher page 9 citations

Abstract

3D integration consists of 3D IC packaging, 3D IC integration, and 3D Si integration. They are different and in general the TSV (through-silicon via) separates 3D IC packaging from 3D IC integration and 3D Si integration since the latter two use TSV but 3D IC packaging does not. TSV (with a new concept that every chip could have two surfaces with circuits) is the focus of this investigation. State-of-the-art, key differences, trends of these three technologies, and a 3D integration roadmap are presented.

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What this paper is about

3D integration consists of 3D IC packaging, 3D IC integration, and 3D Si integration. They are different and in general the TSV (through-silicon via) separates 3D IC packaging from 3D IC integration and 3D Si integration since the latter two use TSV but 3D IC packaging does not. TSV (with a new concept that every chip could have two surfaces with circuits) is the focus of this investigation. State-of-the-art, key differences, trends of these three technologies, and a 3D integration roadmap are presented.

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OpenAlex reports 9 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

3D integration consists of 3D IC packaging, 3D IC integration, and 3D Si integration. They are different and in general the TSV (through-silicon via) separates 3D IC packaging from 3D IC integration and 3D Si integration since the latter two use TSV but 3D IC packaging does not. TSV (with a new concept that every chip could have two surfaces with circuits) is the focus of this investigation. State-of-the-art, key differences, trends of these three technologies, and a 3D integration roadmap are presented.

Key concepts: Three-dimensional integrated circuit, Through-silicon via, Integrated circuit, Integrated circuit packaging, Silicon, Key (lock), Focus (optics), Chip

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