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Scanning tunneling microscope combined with a scanning electron microscope

Ch. Gerber, Gerd K. Binnig, Harald Fuchs, Othmar Marti, Heinrich Rohrer

Open publisher page 279 citations

Abstract

We have developed a small scanning tunneling microscope (STM) to be incorporated into a scanning electron microscope (SEM). Vibration isolation and damping is achieved solely with Viton dampers. As a stand-alone unit, a tunnel-gap stability of about 1 Å is reached at atmospheric air pressure without additional sound protection. Stability improves by at least an order of magnitude when incorporated into a SEM.

About this research paper

What this paper is about

We have developed a small scanning tunneling microscope (STM) to be incorporated into a scanning electron microscope (SEM). Vibration isolation and damping is achieved solely with Viton dampers. As a stand-alone unit, a tunnel-gap stability of about 1 Å is reached at atmospheric air pressure without additional sound protection. Stability improves by at least an order of magnitude when incorporated into a SEM.

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OpenAlex reports 279 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

We have developed a small scanning tunneling microscope (STM) to be incorporated into a scanning electron microscope (SEM). Vibration isolation and damping is achieved solely with Viton dampers. As a stand-alone unit, a tunnel-gap stability of about 1 Å is reached at atmospheric air pressure without additional sound protection. Stability improves by at least an order of magnitude when incorporated into a SEM.

Key concepts: Scanning electron microscope, Scanning tunneling microscope, Materials science, Microscope, Environmental scanning electron microscope, Electrochemical scanning tunneling microscope, Conventional transmission electron microscope, Electron beam-induced deposition

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