1976•Journal of Physics E Scientific InstrumentsOpen access

Direct observation of insulators with a scanning electron microscope

P. Morin, M. Pitaval, E. Vicario

Abstract

A low energy electron gun is used to discharge insulating specimens during observation with a scanning electron microscope. The apparatus includes essentially the gun, an optical microscope, a supplementary grid before the electron detector, and a video signal chopper. Either topographic, chemical, crystallographic or potential contrasts can be observed with a high energy (30 keV) electron probe; observation of insulators under deformation is possible.

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Available abstract

Key concepts: Low-voltage electron microscope, Electron beam-induced deposition, Scanning electron microscope, Conventional transmission electron microscope, Chopper, Materials science, Electron microscope, Microscope