2010•Microelectronics ReliabilityRequires access

Observation of halo implant from the drain side reaching the source side and vice versa in extremely short p-channel transistors

W.S. Lau, Peizhen Yang, Eng Hua Lim, Yee Ling Tang, Seow Wei Lai, V.L. Lo, S. Y. Siah, L. Chan

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Key concepts: NMOS logic, PMOS logic, Transistor, Materials science, Optoelectronics, MOSFET, Electrical engineering, Gate oxide

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Observation of halo implant from the drain side reaching the source side and vice versa in extremely short p-channel transistors — Research Paper | ScholarLens