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1986•Journal of Vacuum Science & Technology A Vacuum Surfaces and FilmsRequires access

Quartz friction vacuum gauge for pressure range from 0.001 to 1000 Torr

M. Ono, Masahiko Hirata, Kiyohide KOKUBUN, Hiroyuki Murakami, Hisao Hojo, H. Kawashima, H. Kyogoku

Open publisher page 17 citations

Abstract

A quartz friction vacuum gauge (QF gauge) is based on the fact that the resonance impedance of a quartz oscillator is proportional to the frictional force of ambient gas. The first model of the QF gauge, which was developed by the authors as a wide range pressure monitor, has the minimum measuring pressure of 0.01 Torr with an accuracy of the order of 10%. To lower the minimum measurable pressure, we developed a sensing head consisting of a tuning fork oscillator with higher sensitivity fixed on a temperature-stabilized metal rod and a digital readout circuit. The performance of the gauge was evaluated from results of measurement of pressure dependence, temperature variations, and fluctuations of the gauge output, which is proportional to the resonance current of the oscillator. It was confirmed that an error in measurement by the gauge is within ±10% for pressure from 0.001 to 1000 Torr.

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What this paper is about

A quartz friction vacuum gauge (QF gauge) is based on the fact that the resonance impedance of a quartz oscillator is proportional to the frictional force of ambient gas. The first model of the QF gauge, which was developed by the authors as a wide range pressure monitor, has the minimum measuring pressure of 0.01 Torr with an accuracy of the order of 10%. To lower the minimum measurable pressure, we developed a sensing head consisting of a tuning fork oscillator with higher sensitivity fixed on a temperature-stabilized metal rod and a digital readout circuit. The performance of the gauge was evaluated from results of measurement of pressure dependence, temperature variations, and fluctuations of the gauge output, which is proportional to the resonance current of the oscillator. It was confirmed that an error in measurement by the gauge is within ±10% for pressure from 0.001 to 1000 Torr.

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Available abstract

A quartz friction vacuum gauge (QF gauge) is based on the fact that the resonance impedance of a quartz oscillator is proportional to the frictional force of ambient gas. The first model of the QF gauge, which was developed by the authors as a wide range pressure monitor, has the minimum measuring pressure of 0.01 Torr with an accuracy of the order of 10%. To lower the minimum measurable pressure, we developed a sensing head consisting of a tuning fork oscillator with higher sensitivity fixed on a temperature-stabilized metal rod and a digital readout circuit. The performance of the gauge was evaluated from results of measurement of pressure dependence, temperature variations, and fluctuations of the gauge output, which is proportional to the resonance current of the oscillator. It was confirmed that an error in measurement by the gauge is within ±10% for pressure from 0.001 to 1000 Torr.

Key concepts: Torr, Pressure measurement, Gauge (firearms), Quartz, Resonance (particle physics), Crystal oscillator, Range (aeronautics), Sensitivity (control systems)

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