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1976•Review of Scientific InstrumentsRequires access

Check on the linearity of a capacitance diaphragm manometer between 10−4 and 10−1 Torr

B. Van Zyl

Open publisher page 10 citations

Abstract

A procedure is outlined whereby the pressure measurement linearity of a certain class of capacitance diaphragm manometers can be evaluated. Data are presented to illustrate the technique as applied to the 10−4–10−1 Torr pressure range.

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What this paper is about

A procedure is outlined whereby the pressure measurement linearity of a certain class of capacitance diaphragm manometers can be evaluated. Data are presented to illustrate the technique as applied to the 10−4–10−1 Torr pressure range.

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OpenAlex reports 10 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

A procedure is outlined whereby the pressure measurement linearity of a certain class of capacitance diaphragm manometers can be evaluated. Data are presented to illustrate the technique as applied to the 10−4–10−1 Torr pressure range.

Key concepts: Torr, Pressure measurement, Diaphragm (acoustics), Linearity, Capacitance, Materials science, Acoustics, Electrical engineering

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Check on the linearity of a capacitance diaphragm manometer between 10−4 and 10−1 Torr — Research Paper | ScholarLens