2006•Czechoslovak Journal of PhysicsRequires access

Deposition of organic polymers at higher substrate temperatures in atmospheric pressure glow discharge

Martin Šíra, David Trunec, Pavel Šťahel, Vilma Buršı́ková, Daniel Franta

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Key concepts: Organosilicon, Hexamethyldisiloxane, Materials science, Glow discharge, Polymer, Ellipsometry, Deposition (geology), Atmospheric pressure

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