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2009•International Journal of Surface Science and EngineeringRequires access

Multi-scale analysis of high precision surfaces by Stylus Profiler, Scanning White-Light Interferometry and Atomic Force Microscopy

Nabil Jouini, A. Gautier, P. Revel, Pierre‐Emmanuel Mazeran, Maxence Bigerelle

Open publisher page 30 citations

Abstract

The relevance of three different techniques (Stylus Profiler (SP), Scanning White-Light Interferometry (SWLI) and Atomic Force Microscopy (AFM)) to characterise the topography of aluminium and hard steel surfaces, was investigated. Evolution of roughness parameters (Ra and Rt) was analysed according to the evaluation length. Asymptotic Ra values showed good agreement between data measured by SP and by AFM. SWLI data show important discrepancies with the other instruments due to their sensitivity to surface morphologies. AFM is the best instrument to detect micro-roughness but is limited by its maximum evaluation length. SP (2D measures) is, therefore, a good compromise to characterise surface morphologies over a wide spatial range.

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What this paper is about

The relevance of three different techniques (Stylus Profiler (SP), Scanning White-Light Interferometry (SWLI) and Atomic Force Microscopy (AFM)) to characterise the topography of aluminium and hard steel surfaces, was investigated. Evolution of roughness parameters (Ra and Rt) was analysed according to the evaluation length. Asymptotic Ra values showed good agreement between data measured by SP and by AFM. SWLI data show important discrepancies with the other instruments due to their sensitivity to surface morphologies. AFM is the best instrument to detect micro-roughness but is limited by its maximum evaluation length. SP (2D measures) is, therefore, a good compromise to characterise surface morphologies over a wide spatial range.

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OpenAlex reports 30 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

The relevance of three different techniques (Stylus Profiler (SP), Scanning White-Light Interferometry (SWLI) and Atomic Force Microscopy (AFM)) to characterise the topography of aluminium and hard steel surfaces, was investigated. Evolution of roughness parameters (Ra and Rt) was analysed according to the evaluation length. Asymptotic Ra values showed good agreement between data measured by SP and by AFM. SWLI data show important discrepancies with the other instruments due to their sensitivity to surface morphologies. AFM is the best instrument to detect micro-roughness but is limited by its maximum evaluation length. SP (2D measures) is, therefore, a good compromise to characterise surface morphologies over a wide spatial range.

Key concepts: Stylus, Materials science, White light interferometry, Interferometry, Surface roughness, Atomic force microscopy, Surface finish, Optics

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Multi-scale analysis of high precision surfaces by Stylus Profiler, Scanning White-Light Interferometry and Atomic Force Microscopy — Research Paper | ScholarLens