P.J. Clapis, A. M. Ledger, K.E. Daniell
Abstract
In this paper, we analyze why SOI wafers appear as they do to the naked eye. We show how a thickness variation as small as ten Angstroms can cause a readily discernible color change, and why this optical effect is much stronger in a thinned SOI wafer than in an oxide-coated wafer or in thick SOI wafers.>
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In this paper, we analyze why SOI wafers appear as they do to the naked eye. We show how a thickness variation as small as ten Angstroms can cause a readily discernible color change, and why this optical effect is much stronger in a thinned SOI wafer than in an oxide-coated wafer or in thick SOI wafers.>
Key concepts: Wafer, Silicon on insulator, Angstrom, Naked eye, Variation (astronomy), Materials science, Optoelectronics, Silicon