2006•CIRP AnnalsRequires access

Influence of Debris Accumulation on Material Removal and Surface Roughness in Micro Ultrasonic Machining of Silicon

Ze Yu, Xiaojun Hu, K. P. Rajurkar

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Key concepts: Machining, Ultrasonic machining, Brittleness, Surface roughness, Materials science, Ultrasonic sensor, Surface finish, Mechanical engineering

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Influence of Debris Accumulation on Material Removal and Surface Roughness in Micro Ultrasonic Machining of Silicon — Research Paper | ScholarLens