2001•Journal of Materials ScienceRequires access

Preparation and etching processing of planar thin film of Pr3+-doped fluorozirconate glass

Yuki KAWAMOTO, Miyuki Teramoto, Takafumi Hatano, Masanori Shojiya

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Key concepts: Etching (microfabrication), Dry etching, Reactive-ion etching, Materials science, Electron cyclotron resonance, Amorphous solid, Analytical Chemistry (journal), Scanning electron microscope

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