High-performance MRAM technology with an improved magnetic tunnel junction material
Mizuki Motoyoshi, K. Moriyama, H. Mori, C. Fukumoto, H. Itoh, Hiroshi Kano, K. Bessho, H. Narisawe
Abstract
Mizuki Motoyoshi, K. Moriyama, H. Mori, C. Fukumoto, H. Itoh, Hiroshi Kano, K. Bessho, H. Narisawe
Abstract
This work is a report on high-performance MRAM technology. 0.4/spl times/0.8 /spl mu/m/sup 2/ MTJ elements were successfully integrated with 0.35 /spl mu/m CMOS technology without process-induced damage. A magnetoresistance (MR) ratio of more than 55% and the read/write operating point were obtained by introducing an improved magnetic tunnel junction (MTJ) material. The short-pulse writing in combination with an improved cell structure suggests that MRAM has a great deal of potential for low power applications.
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This work is a report on high-performance MRAM technology. 0.4/spl times/0.8 /spl mu/m/sup 2/ MTJ elements were successfully integrated with 0.35 /spl mu/m CMOS technology without process-induced damage. A magnetoresistance (MR) ratio of more than 55% and the read/write operating point were obtained by introducing an improved magnetic tunnel junction (MTJ) material. The short-pulse writing in combination with an improved cell structure suggests that MRAM has a great deal of potential for low power applications.
Key concepts: Magnetoresistive random-access memory, Tunnel magnetoresistance, CMOS, Materials science, Tunnel junction, Optoelectronics, Magnetoresistance, Electrical engineering