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Correlation between properties and microstructure in Si-O-N nanostructured coatings obtained by magnetron sputtering

Vanda Godinho, C. Fernandez Ramos, Teresa Cristina Rojas, Javier García López, Marie‐Paule Delplancke, A. Fernandez Fernandez

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info:eu-repo/semantics/published

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Available abstract

info:eu-repo/semantics/published

Key concepts: Microstructure, Materials science, Sputter deposition, Metallurgy, Sputtering, Cavity magnetron, Thin film, Nanotechnology

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Correlation between properties and microstructure in Si-O-N nanostructured coatings obtained by magnetron sputtering — Research Paper | ScholarLens