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Microstructural, chemical and mechanical characterization of Si-O-N amorphous coatings obtained by magnetron sputtering

Vanda Godinho, C. Fernandez Ramos, A. Justo, Javier García López, Marie‐Paule Delplancke, A. Fernandez Fernandez

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Key concepts: Materials science, Amorphous solid, Sputter deposition, Characterization (materials science), Sputtering, Metallurgy, Cavity magnetron, Mineralogy

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