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Microstructure and physical properties of BxNy(OzHk) coatings deposited by r.f. magnetron sputtering

V. Rigato, M. Spolaore, Fabrizio Giorgis, Laura E. Depero, L. Sangaletti, Paolo Angelo Colombo

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Key concepts: Microstructure, Materials science, Sputter deposition, Metallurgy, Cavity magnetron, High-power impulse magnetron sputtering, Physical vapor deposition, Sputtering

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Microstructure and physical properties of BxNy(OzHk) coatings deposited by r.f. magnetron sputtering — Research Paper | ScholarLens