2010•Unpublished venueRequires access
Introduction to Microfabrication
Sami Franssila
Open publisher page 309 citations
Abstract
Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. Introduction to Microfabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions.Featuring:* A comprehensive presentation of basic fabrication processes* An emphasis on materials and microstructures, rather than devic