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1998•IEICE Transactions on ElectronicsRequires access

Development of Transparent Alkylsulfonium Salt as a Photoacid Generator for ArF Excimer Laser Lithography

Kaichiro Nakano, Katsumi Maeda, Shigeyuki Iwasa, Etsuo Hasegawa

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Key concepts: Lithography, Excimer laser, Salt (chemistry), Excimer, Materials science, Generator (circuit theory), Laser, Optoelectronics

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Development of Transparent Alkylsulfonium Salt as a Photoacid Generator for ArF Excimer Laser Lithography — Research Paper | ScholarLens