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1996•한국고분자학회 학술대회 연구논문 초록집Requires access

Chemically Amplified Positive Resists for ArF Excimer Laser Lithography

안성남, 강영종, 이해원, 김응렬, 박춘근, 최상준

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Key concepts: Resist, Lithography, Excimer laser, Excimer, Materials science, Laser, Optics, Optoelectronics

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