P. Ashburn
Abstract
This chapter contains sections titled: Introduction Differential Epitaxy Silicon-germanium HBT Process Selective Epitaxy Silicon-germanium HBT Process Silicon-germanium-carbon HBT Process Silicon-germanium HBT Process Using Germanium Implantation Radio Frequency Silicon-germanium BiCMOS Process References
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This chapter contains sections titled: Introduction Differential Epitaxy Silicon-germanium HBT Process Selective Epitaxy Silicon-germanium HBT Process Silicon-germanium-carbon HBT Process Silicon-germanium HBT Process Using Germanium Implantation Radio Frequency Silicon-germanium BiCMOS Process References
Key concepts: Heterojunction bipolar transistor, Germanium, Silicon, Silicon-germanium, Materials science, Optoelectronics, Heterojunction, Epitaxy