W. Menz, J. Mohr, Oliver Paul
Abstract
This chapter contains sections titled: Silicon Technology Silicon Micromachining Surface Micromachining Micro Transducers and Systems Based on Silicon Technology Summary and Outlook
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This chapter contains sections titled: Silicon Technology Silicon Micromachining Surface Micromachining Micro Transducers and Systems Based on Silicon Technology Summary and Outlook
Key concepts: Microsystem, Surface micromachining, Silicon, Bulk micromachining, Materials science, Engineering, Nanotechnology, Optoelectronics