2012•Elsevier eBooksRequires access
Printed thick-film mechanical microsystems (MEMS)
Steve Beeby
Open publisher page 5 citations
Abstract
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Steve Beeby
Abstract
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OpenAlex reports 5 citations for this work. Citation counts describe recorded attention and do not establish research quality.
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Key concepts: Microsystem, Surface micromachining, Materials science, Microelectromechanical systems, Ceramic, Lead zirconate titanate, Silicon, Bulk micromachining