1997•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access
Surface analysis with scanning probe microscopy
Todd G. Ruskell
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Abstract
Scanning probe microscopy is reviewed, including some of the abilities of scanning tunneling microscopy and spectroscopy. The technology of atomic force microscopy is discussed, including tip and cantilever fabrication and preparation, as well as a variety of detection schemes to measure cantilever deflection. Several atomic force microscopy techniques, including constant force imaging, interleaved imaging, resonantly-enhanced imaging, adhesion force microscopy and friction force microscopy are also reviewed. Finally, two important applications of scanning probe microscopy, magnetic force and scanning capacitance microscopy, are discussed.