1995•Unpublished venueRequires access

Ion beam analysis of thin films. Applications to porous silicon

C. Ortega, A. Grosman, V. Morazzani

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Key concepts: Elastic recoil detection, Ion beam analysis, Nuclear reaction analysis, Rutherford backscattering spectrometry, Silicon, Materials science, Proton, Ion beam

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Ion beam analysis of thin films. Applications to porous silicon — Research Paper | ScholarLens