2019•Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and AtomsRequires access

Ion beam measurements for the investigation of TiN thin films deposited on different substrates by vacuum arc discharge

B. Abdallah, M.S. Rihawy

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Key concepts: Elastic recoil detection, Nuclear reaction analysis, Tin, Ion beam analysis, Materials science, Titanium nitride, Ion beam, Scanning electron microscope

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