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1994•Journal of the Korean Crystal Growth and Crystal TechnologyRequires access

$LiTaO_3$ single crystals growth for SAW device application

Dae-Sik Chung, Yongrae R. Roh, B.H. Park, Y.S. Kim

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Abstract

single crystals (Y, X-axis) were grown from the congruent composition, 48.65 mole %, for SAW (Surface Acoustic Wave) applications. Basic SAW filters were fabricated on the RIST prepared LT wafers (Y-cut) using phtolithography. SAW filter performance was evaluated. The results were compared of the SAW characteristics between RIST prepared LT wafer (Y-cut) and commercial Yamaju wafer (Y-cut). The SAW filter prepared on the RIST grown LT wafer was shown better SAW performances than that of Yamaju wafer.

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What this paper is about

single crystals (Y, X-axis) were grown from the congruent composition, 48.65 mole %, for SAW (Surface Acoustic Wave) applications. Basic SAW filters were fabricated on the RIST prepared LT wafers (Y-cut) using phtolithography. SAW filter performance was evaluated. The results were compared of the SAW characteristics between RIST prepared LT wafer (Y-cut) and commercial Yamaju wafer (Y-cut). The SAW filter prepared on the RIST grown LT wafer was shown better SAW performances than that of Yamaju wafer.

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Available abstract

single crystals (Y, X-axis) were grown from the congruent composition, 48.65 mole %, for SAW (Surface Acoustic Wave) applications. Basic SAW filters were fabricated on the RIST prepared LT wafers (Y-cut) using phtolithography. SAW filter performance was evaluated. The results were compared of the SAW characteristics between RIST prepared LT wafer (Y-cut) and commercial Yamaju wafer (Y-cut). The SAW filter prepared on the RIST grown LT wafer was shown better SAW performances than that of Yamaju wafer.

Key concepts: Wafer, Surface acoustic wave, Materials science, Filter (signal processing), Optoelectronics, Acoustics, Analytical Chemistry (journal), Electrical engineering

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